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Equation Icon  S (f) = S (f) = 16 sin2(πf L) [3 + 2 cos(2 πfL ) + cos(4πf L )]Sproof mass(f ) A E y +8 sin2(πfL )[2 + cos(2πfL )]Syopticalpath(f), (94 ) 2[ 2 proofmass opticalpath ] ST (f) = 2[1 + 2cos(2πf L)] 4 sin (πf L) Sy + Sy (f) . (95 )